Five types of cleaning machine alarms and troubleshooting for vacuum plasma equipment:
Plasma equipment is a process equipment used for plasma surface treatment of materials or products, and vacuum plasma equipment is one of them. How to deal with failures or alarms during use? Now Chengfeng Zhizao has listed some common problems, hoping to help you.

Pump thermal overload protection for vacuum plasma equipment:
When the plasma processing equipment has vacuum pump thermal overload protection, check whether the parameters of the system have changed, because when the equipment is suddenly powered off, all the parameters of the system will be reset to zero, which will cause this kind of alarm of the plasma equipment. In the case of checking the system parameters unchanged, it is necessary to confirm whether the thermal relay is automatically protected, and press the reset button to start the vacuum generation system of the vacuum plasma processing system. If there is no automatic protection, check again whether the circuit is broken or short-circuited. If there are no abnormalities above, check the vacuum pump again.
The air discharge pressure of the vacuum plasma equipment is too low:
When this kind of failure occurs, it may be that the gas is not turned on or the gas is consumed too much. It is necessary to check whether the gas solenoid valve used to break the vacuum at the bottom of the cavity is working properly, and whether there is an open circuit or a short circuit.
Countdown failure of vacuum plasma equipment vacuum pump:
In case of failure, please check the pumping capacity of the vacuum pump first, and then press the reset button after troubleshooting. Material leakage and unclosed vacuum door will affect the pumping capacity of the vacuum pump. In addition, check each node in the plasma vacuum processing system one by one. See if there is a bad or damaged pipe connection.
Alarm when CDA pressure is too low:
This type of alarm is also known as the low breaking air pressure alarm. It is caused by insufficient compressed air pressure. It mainly occurs in plasma processing equipment equipped with high-vacuum pneumatic baffle valves. If this type of alarm occurs, it is necessary to check whether the CDA is normally supplied with air. Device side. Determine whether the air supply pressure is too high or too low, whether the alarm value of the pressure reducing gauge is set correctly, and check the electrical wiring.
Alarm when the vacuum gauge fails:
The vacuum gauge failure alarm may be caused by damage to the vacuum gauge. It is necessary to check the control circuit of the vacuum gauge to determine whether the vacuum gauge is faulty or short-circuited.
The emergency stop of the vacuum plasma processing system cannot be reset or has been pressed, and the emergency stop switch needs to be turned on:
At this time, check whether the emergency stop is suppressed. If not, check the emergency stop line.
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