Introduction to the commonly used electrode feed-in methods of vacuum plasma cleaning machine system:
When it comes to the electrode discharge form of the vacuum plasma cleaner system, everyone usually mentions the CCP capacitively coupled plasma discharge. CCP discharge is currently a more common form of electrode discharge in the vacuum plasma cleaner system, and the power feeding method is used. Mainly. Now we will briefly introduce these two feeding methods.
The more common one is mainly through the cooperation of custom-made copper rods with insulating parts made of polytetrafluoroethylene material, and input them into the vacuum chamber of the vacuum plasma cleaning machine system to connect the copper rods with the continuous structure. In addition, corresponding connectors should be installed on the electrode plate of the vacuum plasma cleaner system. The connection method can adopt pin male and female connection, copper sheet connection and shrapnel connection, copper tape connection and screw connection for the connection bar and electrode plate. Among the above-mentioned connection methods, the pin male and female connection is more common. This connection method is only different from the other two connection methods in the cavity.

Another feeding method is more suitable for the connection of the water-cooled electrode structure, that is, the connecting rod is welded to the electrode plate, and the customized insulating sleeve is matched with the welded connecting rod to connect it to the outer cavity; in the vacuum chamber In other places, use a conductive bar to connect the connecting rod with the output of the plasma generator. If it is confirmed that the vacuum plasma cleaning machine system needs to adopt a water-cooled electrode structure, the welding connecting rod is a hollow structure, so that the design can realize the water flow in the middle and the connecting rod external radio frequency. The specific structure design was determined and optimized according to actual needs.
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