Plasma surface treatment process and equipment for removing photoresist:

Plasma surface treatment is a new type of dry cleaning method. This article mainly introduces plasma surface treatment technology and corresponding equipment for removing photoresist on the wafer surface.
De-glueing is a link in the wafer manufacturing process. Factors such as whether the de-glue is complete and whether the de-glue has damage to the surface will affect the subsequent process. Any kind of small defect may cause all wafers to be scrapped. The wet chemical method is traditionally used for photoresist removal. However, as technology advances, the shortcomings of this method have become increasingly apparent, such as poor reaction control, incomplete cleaning, and easy introduction of impurities. The plasma surface treatment of wafer-level packaging by dry method has strong controllability and good consistency. It can not only completely remove photoresist and other organic substances, but also activate and roughen the wafer surface to improve the wettability of the wafer surface .
The working principle of plasma surface treatment: In a vacuum state, the pressure becomes smaller, the distance between molecules becomes larger, and the force between molecules becomes smaller. The high-voltage alternating electric field generated by a high-frequency source is used to remove oxygen, argon, hydrogen, carbon tetrafluoride, etc. The process gas impacts into a highly reactive or high-energy plasma, and then reacts or collides with organic pollutants and particulate pollutants to form volatile substances, and then the volatile substances are removed by the working airflow and vacuum pump, thereby achieving the cleaning and activation of the plasma surface .
Chengfeng Zhizao focuses on the research and development and manufacturing of plasma technology. If you want to have a more detailed understanding of the equipment or have questions about the use of the equipment, please click on the online customer service of Chengfeng Zhizao. Chengfeng Zhizao is waiting for your call!