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The vacuum plasma cleaner relies on the vacuum pump to vacuum, so how to control the vacuum pump

The vacuum plasma cleaner relies on the vacuum pump to vacuum, so how to control the vacuum pump:
The vacuum plasma cleaner is a device that performs surface treatment on plasma in a vacuum environment. Compared with the atmospheric environment, it has a relatively stable vacuum state and can improve the plasma treatment effect. Vacuum plasma cleaners mainly rely on vacuum pumps for vacuuming. On-line and hand-operated door types are more common. The vacuum pumps used have one pump and two pumps, both of which are controlled by touch screen operation. The control methods are divided into manual control and automatic control. 

plasma

1. Manual operation method.
The vacuum plasma cleaner is manually controlled by pressing the corresponding virtual button on the touch screen, that is, the vacuum pump is turned on. The relay coil is driven by the hardware button, and the touch screen button is driven by the controller's soft element. The controller outputs the result to the controller's output terminal through logical calculations to drive the action of the intermediate relay, and the contacts of the intermediate relay are on and off the vacuum pump AC contactor coil The contacts of the vacuum pump are turned on and off to control the on and off of the three-phase current of the vacuum pump motor.
Second, automatic control mode.
The automatic control is to press the automatic button, that is, all actions are performed automatically, and the start and stop of the vacuum pump are interspersed in the entire process control flow through corresponding logical conditions.
Regardless of whether it is manual control or automatic control, if you want to maintain a certain degree of vacuum, the flowmeter alone cannot meet the requirements. The cavity is pumped by a vacuum pump. If the speed of the vacuum pump motor can be flexibly controlled, the vacuum of the cavity can be easily controlled within the set value. When the vacuum degree of the cavity is less than or greater than the set value, the rotation speed of the vacuum pump motor is automatically adjusted according to the calculation result to keep the motor rotation speed within the range of the set value; when the vacuum degree of the cavity is lower than the set value, as long as If there is a deviation between the vacuum degree of the cavity and the set value, the program will automatically calculate it to keep the speed of the vacuum pump of the vacuum plasma cleaner within the speed range that can maintain the set value. This kind of control is called PID control.
P-proportional formula, I-integral formula, D-differential formula, and PID has timely proportioning function and integral function deviation elimination function, as well as the leading fine-tuning function of differential function. When the error order appears, the difference immediately moves greatly to suppress the error jump; at the same time, it also plays the role of eliminating the error and reducing the error range; because the proportional function is a constant control law, it plays the main control role, so it can make The vacuum degree of the cavity becomes relatively stable; and the integral action makes the error gradually eliminated. Debugging the control parameters of the three functions can give full play to the advantages of the three control laws, so as to achieve the ideal control effect.
Chengfeng Zhizao has focused on the research and development of vacuum plasma cleaners for 20 years. If you want to know more product details or have questions about the use of the equipment, please click on the Chengfeng Zhizao online customer service, waiting for your call!

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