Microwave plasma remover is an indispensable equipment for the industrial production of semiconductor industry:
The microwave plasma remover adopts high-density 2.45GHZ microwave plasma technology to clean, remove and plasma pre-treatment of wafers in semiconductor manufacturing. Microwave plasma cleaning and removing have high activity and no ion to devices. damage. Microwave plasma remover is a new product of microwave plasma processing technology. The wafer ashing equipment has low cost, moderate size and advanced performance, which is especially suitable for industrial production and scientific research institutions.
The microwave plasma remover gas will form a plasma when it contacts the electron area, and the ionized gas generated and the released high-energy electrons form a gas plasma. The kinetic energy of ionized gas atoms is relatively small unless they are accelerated by an electric field. When accelerated, they release enough force to closely combine with the surface driving force, adhering to materials or etching the surface. The plasma effect is transformed into a material etching process, and the use of active gas at the molecular level will also produce a chemical reaction.

The advantages of using microwave plasma remover on semiconductors:
1. Degumming is rapid and thorough.
2. The sample was not damaged in any way.
3. The operation is simple and safe.
4. The design is simple and beautiful.
5. The product is cost-effective.
Microwave plasma remover is an indispensable equipment in the semiconductor industry. It is engaged in the research of micro-nano processing technology. It is mainly used for the drying and removal of various photoresists, substrate cleaning, and electronic components in the semiconductor and other thin film processing processes. Kaifeng and so on. Research direction: plasma surface modification, plasma cleaning of the surface of organic substances, plasma etching, plasma ashing, enhancement or reduction of wettability, etc.
The microwave plasma remover has a simple appearance, a highly integrated system, and a modular design, which is suitable for semiconductors, biotechnology, materials and other fields. Superior performance, can provide excellent industrial control, fault alarm system and data acquisition software. It can meet the strict control requirements of scientific research and production.