Application research on plasma cleaning treatment principle of plasma surface treatment equipment:
　　With the development of society and economy, cleaning technology has been continuously improved and innovated, from the earlier traditional manual cleaning to organic solvent cleaning, high-pressure water jet cleaning and ultrasonic cleaning. With the rapid development of science and technology, at the beginning of this century, as a new type of cleaning technology-plasma surface treatment equipment plasma cleaning technology, this cleaning technology has been gradually applied to the pretreatment of automobile manufacturing before painting, cleaning the surface of liquid crystal glass, and electrical circuits. Plate printing, electroplating, degreasing instead of chemical treatment and other fields.

　　Plasma cleaning technology shows the characteristics of thorough cleaning effect, stable surface treatment, and effective cleaning of difficult parts during the application process. The working principle of the plasma cleaner mainly relies on the "activation" of the active particles in the plasma to achieve the purpose of removing stains on the surface of the object.
In terms of reaction mechanism, plasma cleaning of plasma surface treatment equipment usually includes the following processes: inorganic gas is excited into a plasma state; gas phase is physically adsorbed on the solid surface; adsorption groups react with solid surface molecules to produce product molecules; product molecule analysis A gas phase is formed; reaction residues leave the surface.
　　 There are two main reactions between plasma and the surface of the material: one is physical reaction by plasma, and the other is chemical reaction by free radicals.
　　Plasma cleaning and the physical reaction mechanism of the material surface
The physical reaction between the plasma and the surface of the material is mainly to use ions as pure physical collisions to knock off the atoms on the surface of the material or the ions attached to the surface of the material. Because the average free radical of the ions is lighter and longer when the pressure is low, it has energy. Therefore, during physical impact, the higher the energy of the ion, the easier it is to produce impact. Therefore, if the physical reaction is to be the mainstay, the reaction must be controlled at a lower pressure, so that the cleaning effect is better.
The chemical reaction between the plasma and the surface of the material mainly uses the free radicals in the plasma to make a chemical reaction with the surface of the material. The commonly used gases in the chemical reaction are oxygen, hydrogen, methane, etc., and these gases react to high levels in the plasma. Active free radicals, the role of free radicals is manifested in the "activation" of energy transfer during chemical reactions. Free radicals in an excited state have higher energy and are easy to combine with surface molecules on objects to form new free radicals. The formed free radicals are also in an unstable high-energy state, and they are likely to undergo decomposition reactions. They will become smaller molecules while generating new free radicals. This reaction process may continue to decompose into water, carbon dioxide and the like. Simple molecule.
　　 Under these conditions, a large amount of binding energy will be released, and this energy will become a driving force for initiating a new surface reaction, thereby triggering a chemical reaction on the surface of the object to be removed.
　　The characteristics and advantages of plasma cleaning technology of plasma surface treatment equipment
The characteristic of plasma cleaning technology is that regardless of the type of substrate to be processed, it is very good for metals, semiconductors and most polymer materials, such as polypropylene, polyester, polyimide, epoxy, and even polytetrafluoroethylene. Good cleaning treatment, and can realize the cleaning of the whole, layout and complex structure. There are no restrictions on the geometry of the processed objects.
　　Especially for parts with complex and precise surface shapes that are difficult to clean, such as cavities, grooves, slits, and micropores on the surface of precision parts, they can be cleaned relatively well.
　　Plasma surface treatment equipment Plasma cleaning is a solid-gas dry cleaning technology, using gas as the cleaning medium, effectively avoiding the secondary pollution caused by the liquid medium cleaning to the cleaned object.
The plasma cleaning machine is connected to a vacuum pump. When working, the plasma in the cleaning chamber gently washes the surface of the object to be cleaned. The organic pollutants can be thoroughly cleaned out in a short period of time. At the same time, the contaminants are removed by the vacuum pump and cleaned. The degree reaches the molecular level.