Application of plasma cleaning of online plasma cleaning machine in LED packaging process:
Light-emitting diodes (LEDs) are generally used as indicator lights and display panels. They can not only directly convert electrical energy into light energy with high efficiency, but also have a service life of tens of thousands to hundreds of thousands of hours. At the same time, it is not fragile and energy-saving. Etc.

But there are some problems in the LED production process:
(1) The main problems in the LED manufacturing process are difficult to remove pollutants and oxide layers.
(2) The bracket and the glue are not tightly combined and there are tiny gaps. After a long time of storage, air enters to oxidize the electrode and the bracket surface and cause the lamp to die.
During the LED packaging process, oxides and particle contaminants on the surface of the device will reduce product reliability and affect product quality. The online plasma cleaning machine is used for cleaning before packaging, which can effectively remove the above-mentioned pollutants. Using an online plasma cleaning machine before dispensing silver glue can greatly improve the surface roughness and hydrophilicity of the workpiece, which is beneficial to silver glue paving and chip sticking, and can greatly save the use of silver glue and reduce costs.
The on-line plasma cleaning machine treatment before wire bonding can significantly increase its surface activity, improve bonding strength and the uniformity of bonding wire tension. In some cases, the bonding temperature can also be lowered to increase yield and reduce costs. In the LED epoxy resin injection process, pollutants will cause the bubble formation rate to be high. As a result, the product quality and service life are low, so avoiding the formation of bubbles in the sealing process is also a concern of people.
The surface treatment is performed by a plasma cleaning machine before the LED sealing glue, the chip and the substrate will be more closely combined with the glue, the formation of bubbles will be greatly reduced, and the heat dissipation rate and light emission rate will be significantly improved. The application principle of the plasma cleaning machine is to treat the surface of the workpiece through chemical or physical action to achieve molecular-level pollutant removal (generally with a thickness of 3 to 30 nm), thereby improving the surface activity of the workpiece. The pollutants to be removed may include organic matter, epoxy resin, photoresist, oxide, micro-particle pollutants, etc., so the plasma cleaner processing process is a high-precision cleaning.
In terms of reaction mechanism, plasma cleaning usually includes the following processes:
(1) The inorganic gas is excited to a plasma state;
(2) Gas-phase substances are adsorbed on the solid surface;
(3) The adsorbed group reacts with solid surface molecules to form product molecules;
(4) The product molecules resolve to form a gas phase;
(5) The reaction residue leaves the surface.
The processing method of the online plasma cleaner is a thorough peeling cleaning in the cleaning method. Its advantage is that there is no waste liquid after cleaning. It is characterized by good performance on metal, semiconductor, oxide and most polymer materials. Treatment can realize the cleaning of the whole, part and complex structure.
With the rapid development of the LED industry, online plasma cleaners are bound to promote the rapid development of the LED industry due to its cost-effective and environmental-free characteristics.