The 20-year experience of vacuum plasma cleaning machine manufacturers in selecting flow controllers:
The process gas flow stability is one of the important parameters that affect the treatment effect of the equipment. The mass flow controller is an important link to achieve stable control. What experience is needed in selecting the flow controller? Now Chengfeng Zhizhi vacuum plasma cleaning machine manufacturer is Dear friends, let me introduce you.
In addition, it is recommended to select a dedicated gas source with a flow controller for atmospheric pressure plasma processing equipment to provide stable working gas for the equipment. Then the vacuum plasma cleaning machine manufacturer will generally choose a mass flow controller to achieve the flow of the process gas. Control, vacuum plasma cleaning machine will generally choose 0~50SCCM, 0~500SCCM, some large-scale low-pressure vacuum plasma processing equipment will also use 0~1SLM specification mass flow controller. Knowing the above information, how to choose a gas flow controller? As a brand manufacturer of vacuum plasma cleaners, Chengfeng Zhizhi will give you a chat.

There are different types of process gases. It is recommended to use a mass flow controller dedicated to the corresponding process gas, which can effectively ensure the stability and measurement of the input gas, because the size of the gas molecules is different depending on the process gas used. , Its chemical properties are also different, if the mass flow controller of the same specification is used, flow errors will occur and there will be safety hazards. In addition, if you are using a conventional process gas, you can choose one as the standard gas, and you only need to ensure the stability of the gas flow; it should be noted that if you use special gases such as H2, CF4, or other corrosive and flammable gases For explosive process gases, special mass flow control devices must be used.
The choice of mass flow controller for laboratory vacuum plasma cleaners, experimental equipment generally does not require strict flow control requirements, purely manual equipment can also be measured with manual float flowmeters. Additional considerations when selecting the vacuum plasma cleaning machine manufacturers need to ensure that the pressure of the vacuum reaction chamber is stable, so after choosing a suitable gas flow controller, you should also pay attention to selecting the gas pipe joint. In order to meet the air tightness of the process gas vacuum pipeline, a quick-turn joint or a card sleeve joint is often used as a gas pipe joint.
In addition, when handling some special materials, liquid monomer may be used as the discharge medium. In this case, a manual float flowmeter must be used as a flow controller; for corrosive monomers, an anticorrosive float flowmeter is required; In a vacuum environment, a highly sealed float flowmeter is recommended.
If you need to monitor the flow of liquid monomers, you can also add a gas-liquid flow meter, but you need to consider the monomer's unit of measurement, boiling point, condensation point and other factors, and select it according to the situation. The above are some of the experiences summarized by the vacuum plasma cleaning machine manufacturer when choosing the flow controller. Chengfeng Zhizhi has its own R&D team with 20 years of practical operation experience. If you want to know the details of the product or have more information in use For more questions, please click on the online customer service consultation of Chengfeng Zhizao, Chengfeng Zhizao is waiting for your call!