The structure of vacuum plasma surface processor Chengfeng Zhizhi will take you to understand:
Vacuum plasma surface processors are widely used in plasma cleaning, etching, plasma coating, plasma ashing and surface modification. Through its treatment, the wetting ability of the surface of the material can be improved, so that a variety of materials can be coated and other operations, strengthen the adhesion, bonding force, and remove organic pollutants, oil or grease at the same time. The vacuum plasma surface processor uses the properties of these active components to treat the surface of the sample to achieve cleaning and other purposes. The vacuum plasma surface processor can be used for cleaning, etching, activation and surface preparation. Plasma, like solid, liquid or gas, is a state of matter, also called the fourth state of matter. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, active groups, excited nuclides (metastable states), photons, and so on. Plasma surface treatment is to treat the sample surface by using the properties of these active components, so as to achieve the purpose of cleaning, modification, and photoresist ashing.
The structure of the vacuum plasma surface processor is mainly divided into three major parts, which are the control unit, the vacuum chamber, and the vacuum pump.

1. Control unit
For domestic vacuum plasma surface processors, including those imported from abroad, the control unit is mainly divided into four methods: semi-automatic control, fully automatic control, PC computer control, and LCD touch screen control.
The control unit is divided into two major parts:
1) Power supply part: There are three main power supply frequencies, namely 40KHz, 13.56MHz, and 2.45GHz, of which 13.56MHz requires a power supply matcher.
2) System control unit: There are three types, button control (semi-automatic, full-automatic), computer control, and PLC control (LCD touch screen control).
2. Vacuum chamber
The vacuum chamber is mainly divided into two materials:
1) Stainless steel vacuum chamber.
2) Quartz cavity.
3. Vacuum pump

There are two types of vacuum pumps:
1) Dry pump.
2) Oil pump.
The plasma cleaning/etching machine generates plasma by setting two electrodes in a sealed container to form an electric field. A vacuum plasma surface processor vacuum pump is used to achieve a certain degree of vacuum. As the gas becomes thinner and thinner, the distance between molecules and molecules or ions The distance of free movement is getting longer and longer. Under the action of electric field, they collide to form plasma. These ions are very active and their energy is enough to destroy almost all chemical bonds, causing chemical reactions on any exposed surface. Plasma has different chemical properties. For example, oxygen plasma has high oxidizing property, which can oxidize photoresist to react to generate gas, so as to achieve the cleaning effect; corrosive gas plasma has good anisotropy, so Can meet the needs of etching. Glow will be emitted during plasma processing using a vacuum plasma surface processor, so it is called glow discharge processing.
The characteristic of the vacuum plasma surface processor is that it can process metals, semiconductors, oxides and most polymer materials, such as polypropylene, polyester, polyimide, and polychloride regardless of the type of substrate to be processed. Ethane, epoxy, and even polytetrafluoroethylene can be handled well, and can be used to clean the whole, part, and complex structures.
 With economic development, people’s living standards continue to improve, and the quality requirements for consumer products are getting higher and higher. The plasma technology of vacuum plasma surface processor will gradually enter the consumer goods production industry; in addition, the continuous development of science and technology, various technical problems With the continuous development of new materials and the continuous emergence of new materials, more and more scientific research institutions have realized the importance of plasma technology and invested a lot of money in technical research. The plasma technology of vacuum plasma surface processor has played a very important role in it. We are convinced that the application range of plasma technology will become wider and wider; as the technology matures and the cost decreases, its application will become more popular.